[ Back to EurekAlert! ]

Contact: Liz Ahlberg
University of Illinois at Urbana-Champaign

Amir Arbabi, Gabriel Popescu, Chris Edwards, Lynford Goddard, University of Illinois

Caption: Illinois researchers -- from left, graduate student Amir Arbabi, professor Gabriel Popescu, graduate student Chris Edwards and professor Lynford Goddard -- use a special microscope to simultaneously etch tiny features in semiconductor wafers and monitor the process in real time.

Credit: L. Brian Stauffer

Usage Restrictions: None

Related news release: New method monitors semiconductor etching as it happens -- with light

[ Back to EurekAlert! ]