Contact: Liz Ahlberg
eahlberg@illinois.edu
217-244-1073
University of Illinois at Urbana-Champaign
Caption: Illinois researchers -- from left, graduate student Amir Arbabi, professor Gabriel Popescu, graduate student Chris Edwards and professor Lynford Goddard -- use a special microscope to simultaneously etch tiny features in semiconductor wafers and monitor the process in real time.
Credit: L. Brian Stauffer
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Related news release: New method monitors semiconductor etching as it happens -- with light