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Contact: Liz Ahlberg
eahlberg@illinois.edu
217-244-1073
University of Illinois at Urbana-Champaign

Amir Arbabi, Gabriel Popescu, Chris Edwards, Lynford Goddard, University of Illinois

Caption: Illinois researchers -- from left, graduate student Amir Arbabi, professor Gabriel Popescu, graduate student Chris Edwards and professor Lynford Goddard -- use a special microscope to simultaneously etch tiny features in semiconductor wafers and monitor the process in real time.

Credit: L. Brian Stauffer

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Related news release: New method monitors semiconductor etching as it happens -- with light


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