Developing the Next Generation of Microsensors (image) California Institute of Technology Share Print E-Mail Caption Scanning electron microscope image of an array of optomechanical accelerometer devices formed in the surface of a silicon microchip. Highlighted green areas represent proof masses which are suspended by nanoscale tethers across the open etched areas of the chip. Even smaller, and barely visible, are pink highlighted optical cavities which sensitively read out the motion of the proof masses. Credit Martin Winger Usage Restrictions None Share Print E-Mail Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.