Contact: Mark Bello
National Institute of Standards and Technology (NIST)
Caption: New NIST Reference Materials for MEMS devices are micromachined and further processed to contain miniature cantilevers, beams, stair-like step heights, microscale rulers and test structures for measuring surface-layer thickness. On the left is RM 8096, which was manufactured with an integrated circuit process; on the left is RM 8097, made with a MEMS process.
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Related news release: New NIST measurement tool is on target for the fast-growing MEMS industry