NIST Reference Materials for MEMS Devices (image) National Institute of Standards and Technology (NIST) Share Print E-Mail Caption New NIST Reference Materials for MEMS devices are micromachined and further processed to contain miniature cantilevers, beams, stair-like step heights, microscale rulers and test structures for measuring surface-layer thickness. On the left is RM 8096, which was manufactured with an integrated circuit process; on the left is RM 8097, made with a MEMS process. Credit NIST Usage Restrictions None Share Print E-Mail Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.