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Contact: Andrea Siedsma
asiedsma@soe.ucsd.edu
858-822-0899
University of California - San Diego
Caption: Mark Tillack, a UC San Diego mechanical and aerospace engineering scientist, is developing laser-produced light sources for next generation Extreme Ultraviolet Lithography.
Credit: University of California, San Diego
Usage Restrictions: None
Related news release: UC San Diego researchers enhance lithography light sources
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