Figure 1 (IMAGE)
Caption
From left to right: An energy-filtered transmission electron microscopy image of a specimen with features on either side, including a nano-pit etched through an amorphous silicon nitride (SiNx) membrane; the top view of the 3D reconstruction that shows etching artifacts such as the rim, petals and a debris blob; the bottom view shows the widening of the nano-pit opening towards the bottom surface.
Credit
Communications Physics
Usage Restrictions
NA
License
Licensed content