Schematic representation of the design and fabrication of the one-dimensional (1D) piezoelectric micromachined ultrasound transducer (pMUT) array for localized ultrasound stimulation. (IMAGE)

Aerospace Information Research Institute, Chinese Academy of Sciences

Schematic representation of the design and fabrication of the one-dimensional (1D) piezoelectric micromachined ultrasound transducer (pMUT) array for localized ultrasound stimulation.

Caption

Schematic representation of the design and fabrication of the one-dimensional (1D) piezoelectric micromachined ultrasound transducer (pMUT) array for localized ultrasound stimulation. a Schematic image of the 1D pMUT array. b Fabrication of the pMUT array via a wafer bonding process.

Credit

Microsystems & Nanoengineering

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CC BY

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