Structure of the proposed weak-coupling resonator and sensor. (IMAGE)

Aerospace Information Research Institute, Chinese Academy of Sciences

Structure of the proposed weak-coupling resonator and sensor.

Caption

Structure of the proposed weak-coupling resonator and sensor. a Structure of the proposed weak-coupling resonator. b Schematic of diaphragm deformation and stress under the loaded pressure. c Structure of the sensor chip. d Infrared microscope image of the fabricated sensor from diaphragm side. e The picture of the fabricated sensor chip.

Credit

Microsystems & Nanoengineering

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