Figure | Metasurface for lithography alignment. (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Figure | Metasurface for lithography alignment.

Caption

Figure | Metasurface for lithography alignment. （a）Setup showing UV exposure light (purple) and measurement photons (red). Inset: Orthogonal photons become entangled via the metasurface, emitting at identical angles. (b-c) Scanning electron microscope images of the titanium-dioxide metasurface. Scale bar: 1 μm.

Credit

Din Ping Tsai et al.

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License

CC BY

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