Fabrication of conformal ultra-thin metal films (IMAGE)
Caption
(a) Schematic illustration of the multi-angle co-velocity trajectory fitting deposition model integrated with the metal co-doping process. Co-doping targets move along the trajectory-coupled path to perform deposition at positions corresponding to different sputtering angles α. (b) Schematic of island morphology in conformal pure ultra-thin metal film. (c) Schematic of continuous morphology in conformal co-doped ultra-thin metal film
Credit
By Heyan Wang, Jianghai He, Yingzheng Ren, Huan Liu, Yibin Jin, Yilei Zhang, Zhengang Lu* and Jiubin Tan
Usage Restrictions
Credit must be given to the creator.
License
CC BY