SEM pictures of the fabricated MEMS prototype and its key elements. (IMAGE)

Aerospace Information Research Institute, Chinese Academy of Sciences

SEM pictures of the fabricated MEMS prototype and its key elements.

Caption

a Stitched SEM image of the fabricated device. b The nonlinear inclined bucking beam spring mechanism. c Mechanical stopper, linear spring, and fixed and movable comb fingers at the bottom of the proofmass. d Optical fiber inlay with the side wall of the proofmass. e Integrated fiber on the chip.

Credit

Microsystems & Nanoengineering

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