Reusable SAW sensor for selective PM10 and PM2.5 detection. (IMAGE)
Caption
eusable SAW sensor for selective PM10 and PM2.5 detection. Schematic overview of the reusable surface acoustic wave (SAW) particulate matter sensor system. The figure shows the porous membrane filter, sensor assembly, and sensing mechanism for particle-size-selective detection. A microperforated membrane is mounted above the SAW resonator to separate airborne particles by size, allowing simultaneous monitoring of particulate matter (PM) in the PM10 and PM2.5 ranges. The lower panel illustrates microheater-assisted particle detachment, which restores the sensor surface after dust exposure and enables repeated use. The frequency-shift curves on the right show the sensor response during particle capture and its recovery after heating.
Credit
Microsystems & Nanoengineering
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