Figure 1 | Off-axis BADF-OCT synchronous imaging detection principle and optical path diagram. (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Figure 1 | Off-axis BADF-OCT synchronous imaging detection principle and optical path diagram.

Caption

Figure 1 | Off-axis BADF-OCT synchronous imaging detection principle and optical path diagram. a, Principle of detecting SSDs in SiC using the off-axial BADF-OCT. b, Schematic of the off-axis synchronous BADF-OCT system. LS: light source; L1-L3: lenses; P1-P3: beam splitters; M1-M4: mirrors; PC1-PC4: polarization controllers; PL1-PL2: dispersion compensation elements; FA: fibre array; G: grating; CCD: camera; BC1-BC2: reflective beam collimators; S: scanner; Obj: objective lens; blue beam: composite colour light; green beam: bright field; purple beam: dark field.

Credit

Yukun Wang et al.

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CC BY

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