Figure | Comprehensive in-house pipeline for atomic-scale fabrication and in situ validation of Kirkpatrick–Baez (KB) nanofocusing mirrors at the National Synchrotron Light Source II (NSLS-II). (IMAGE)
Caption
Figure | Comprehensive in-house pipeline for atomic-scale fabrication and in situ validation of Kirkpatrick–Baez (KB) nanofocusing mirrors at the National Synchrotron Light Source II (NSLS-II). a, Atomic-scale mirror fabrication employing ion beam figuring (IBF) for deterministic correction of elliptical surface profiles, followed by rhodium coating. b, Ex situ surface metrology demonstrating sub-nanometer residual height errors of 0.4 nm root-mean-square after IBF processing and coating. c, Numerical modeling of the nanoprobe at 12 keV using Synchrotron Radiation Workshop (SRW) to simulate wavefront propagation under partial coherence; the predicted focal spot size is 77 × 36 nm2 (V × H, Full Width at Half Maximum (FWHM)) for an 8×7 𝜇m2 secondary source aperture. d, In situ ptychographic characterization of the nanoprobe at the NSLS-II HXN beamline, yielding a reconstructed focal spot of 70.5 × 33.1 nm2 FWHM, in high agreement with the SRW simulation. e, X-ray fluorescence (XRF) microscopy of a Siemens star test structure, resolving the innermost features at length scales on the order of ∼ 30 nm. f, Quantitative validation of the fabrication–metrology loop, demonstrating spatial correspondence between ex situ surface residuals and in situ wavefront errors, thereby confirming atomic-scale deterministic fabrication performance.
Credit
Tianyi Wang et al.
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