Figure 1 (IMAGE)

Tohoku University

Figure 1

Caption

Fabricated single-crystal diamond MEMS cantilever. The schematic above shows the cross-sectional structure consisting of a single-crystal diamond layer (SCD-CVD layer), an ion-implantation-induced defective layer, and a graphite sacrificial layer.

Credit

Yuta Ochiai et al.

Usage Restrictions

Credit must be given to the creator.

License

CC BY

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