Non-contact measurement of absolute surface profile with 2-nanometer accuracy by measuring the local angle distribution of curved mirrors (IMAGE)

National Institute of Advanced Industrial Science and Technology

Non-contact measurement of absolute surface profile with 2-nanometer accuracy by measuring the local angle distribution of curved mirrors

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Non-contact measurement of absolute surface profile with 2-nanometer accuracy by measuring the local angle distribution of curved mirrors

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National Institute of Advanced Industrial Science and Technology (AIST)

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