Ionic liquids enable room-temperature dry etching of metal–organic frameworks (IMAGE)

Tokyo University of Science

Ionic liquids enable room-temperature dry etching of metal–organic frameworks

Caption

Filling the pores of metal–organic frameworks with ionic liquids improves their mechanical stability and helps protect their delicate structures from beam damage. Using this method, the researchers demonstrated fine patterning with sub-100 nm precision at room temperature.

Credit

Professor Kentaro Kinoshita and Mr. Koki Egawa from Tokyo University of Science, Japan

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