Making a Good Impression: Nanoimprint Lithography Tests at NIST (IMAGE)

National Institute of Standards and Technology (NIST)

Making a Good Impression: Nanoimprint Lithography Tests at NIST

Caption

Electron micrograph shows a cross-section of a typical SOG microcircuit feature. Nanoporous regions in the interior are lighter. The process forms a dense, stronger skin about 2 nanometers thick on the outside. (Color added for clarity.)

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NIST

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