Computer Simulations of 2 Possible Morphologies (IMAGE)

National Institute of Standards and Technology (NIST)

Computer Simulations of 2 Possible Morphologies

Caption

Computer simulations of two possible morphologies of a block copolymer film demonstrate the need for an accurate 3-D imaging tool. Red and blue areas represent the two different phases of the polymer film, seen from the side. Each phase is about 12 nm wide. Viewed from the top, both would appear to have evenly separated rows of the "red" phase, the bottom sample in fact has an unwanted horizontal band that will disrupt the pattern transfer. Soft X-ray scattering data can distinguish the two.

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Pitera/IBM Almaden Research Center

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