NIST Reference Materials for MEMS Devices (IMAGE)

National Institute of Standards and Technology (NIST)

NIST Reference Materials for MEMS Devices

Caption

New NIST Reference Materials for MEMS devices are micromachined and further processed to contain miniature cantilevers, beams, stair-like step heights, microscale rulers and test structures for measuring surface-layer thickness. On the left is RM 8096, which was manufactured with an integrated circuit process; on the left is RM 8097, made with a MEMS process.

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NIST

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