Micronova Cleanroom ALD (IMAGE) Aalto University Caption The researchers made their breakthrough with the help of a Finnish invention: the atomic layer deposition method. Credit Photo by Antti Matikainen Usage Restrictions None License Licensed content Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.