One Device, Many Frequencies (IMAGE)
Caption
This scanning electron micrograph shows a microelectromechanical resonator. The resonator consists of three single crystal silicon beams clamped at both ends. The center of the beams are connected to two comb drives for actuation and motion transduction. The fundamental vibration of the beam is in the plane of the comb drives. However, at higher frequencies, the resonator can move with a twisting motion around the center beams. When these two vibrational motions interact, a periodic motion can be induced whose spectrum consists of a multitude of frequencies with equal spacing, comprising a frequency comb. This image was taken using an FEI Nova 600 Nanolab scanning electron microscope at the Center for Nanoscale Materials.
Credit
Argonne National Laboratory
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