Plasmonic Lithography Schematic (IMAGE)

University of California - Berkeley

Plasmonic Lithography Schematic

Caption

In this schematic of plasmonic lithography, the plasmonic flying head produces nanoscale patterns onto the spinning disk covered with photo sensitive chemicals. Ultraviolet light is delivered through the flying head onto the plasmonic lenses, which are used as optical styluses in this process. The setup resembles a stylus playing a record on traditional LP turntables.

Credit

Liang Pan and Cheng Sun, UC Berkeley

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