Conventional Versus Proposed MEMS Energy Harvesters (IMAGE)

_Tokyo Institute of Technology

Conventional Versus Proposed MEMS Energy Harvesters

Caption

Unlike conventional electret-based MEMS energy harvesters, which contain the entire system in a single chip, the proposed design methodology involves having the electret and the MEMS tunable capacitor in different chips, loosening up design constraints.

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Daisuke Yamane

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