Flowchart of the proposed algorithm for speeding up the aerial image simulations in computational lithography. (IMAGE)

SPIE--International Society for Optics and Photonics

Flowchart of the proposed algorithm for speeding up the aerial image simulations in computational lithography.

Caption

Flowchart of the proposed algorithm for speeding up the aerial image simulations in computational lithography. By scaling up the input data appropriately, one can apply the fast Fourier transform (FFT) instead of the regular Fourier transform, obtaining a remarkable speedup in calculation. The simulated aerial image is then computed by scaling down the output of the inverse FFT with negligible errors in intensity.

Credit

The Authors doi: 10.1117/1.JMM.22.2.023201.

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