Figure 1. Schematic Image of the Proposed MEMS Structure (image) Tokyo Institute of Technology Share Print E-Mail Caption The illustration shows a schematic image of the proposed single-axis MEMS capacitive accelerometer. Input acceleration can be sensed by monitoring the capacitance change between the proof mass and the fixed electrode. The device is realized by the multiple layers made of electroplated gold. We utilize the third (M3) and fourth (M4) layers for the spring structure, and the M4 and fifth (M5) layers for the proof mass structure. Credit Sensors and Materials, Daisuke Yamane Usage Restrictions None Share Print E-Mail Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.