The technology, a direct-to-digital holography process, allows for high-speed and high-sensitivity detection of defects in semiconductor device structures.
The award recognizes laboratory employees who have accomplished outstanding work in the process of transferring a technology developed by a federal laboratory to the commercial marketplace.
The technology received an award in technology transfer earlier this year from the Southeastern Federal Laboratory Consortium, which includes more than 40 federal laboratories in nine Southeastern states.
ORNL researchers working on the project are Phillip Bingham, Matt Chidley, Jim Goddard, Jim Hardy, Greg Hanson, Kathy Hylton, Jeff Price, Chuck Schaich, John Simpson, Ken Tobin and John Turner of ORNL's Engineering Science and Technology Division, and Larry Baylor and Dave Rasmussen of the laboratory's Fusion Energy Division.
The national awards will be presented May 8 during the Federal Laboratory Consortium meeting in Little Rock, Ark.
ORNL is a multiprogram science and technology laboratory managed by UT-Battelle for the Department of Energy.