PT-symmetric silicon micromechanical resonators. (IMAGE)
Caption
PT-symmetric silicon micromechanical resonators. a Schematic of an electrically coupled beam resonators. The electrostatic coupling produces an equivalent coupling spring kc. A feedback loop is used to generate gain gs, and it consists of trans-impedance amplifier (TIA), voltage amplifier (VA), bandpass filter (BPF), automatic gain control (AGC), and phase shifter (PS). Motional current from the gain resonator flows into the feedback loop, and the feedback signal returns to the resonator as a force. Resonator 1 is viewed as a loss resonator, and resonator 2 is viewed as a gain resonator. The forward transmission is defined from the loss resonator to the gain resonator. b Microscope image of fabricated silicon micromechanical resonators. The gold part corresponds to the electrode for feedback, DC supply, and AC path, respectively. The plates in the black dotted frame are electrically coupled.
Credit
Microsystems & Nanoengineering
Usage Restrictions
Credit must be given to the creator. Only noncommercial uses of the work are permitted. No derivatives or adaptations of the work are permitted.
License
CC BY-NC-ND