image: PT-symmetric silicon micromechanical resonators. a Schematic of an electrically coupled beam resonators. The electrostatic coupling produces an equivalent coupling spring kc. A feedback loop is used to generate gain gs, and it consists of trans-impedance amplifier (TIA), voltage amplifier (VA), bandpass filter (BPF), automatic gain control (AGC), and phase shifter (PS). Motional current from the gain resonator flows into the feedback loop, and the feedback signal returns to the resonator as a force. Resonator 1 is viewed as a loss resonator, and resonator 2 is viewed as a gain resonator. The forward transmission is defined from the loss resonator to the gain resonator. b Microscope image of fabricated silicon micromechanical resonators. The gold part corresponds to the electrode for feedback, DC supply, and AC path, respectively. The plates in the black dotted frame are electrically coupled.
Credit: Microsystems & Nanoengineering
Achieving unidirectional signal flow—where information travels in only one direction—is vital for next-generation communication systems. Micromechanical devices leveraging parity-time (PT) symmetry offer a promising route to this goal without the need for bulky magnets. But, are there any distortions in these systems? In a groundbreaking study, researchers present the first experimental exploration of nonlinear distortion in silicon-based PT-symmetric resonators operating in a broken phase. They pinpoint critical performance thresholds, including a 1 dB gain compression point at 5 dBm and an intermodulation intercept point at 11.5 dBm, laying a foundation for more robust and compact nonreciprocal components.
Traditional nonreciprocal devices rely on magnetic materials to steer signals in one direction—an approach that poses significant challenges for integration into modern microelectronic systems. parity-time (PT)-symmetric systems, which feature gain and loss, have emerged as a novel way to break reciprocity using engineered asymmetries instead of magnets. These systems have demonstrated success across optics, acoustics, and mechanics. However, their nonlinear behavior, especially under higher signal strengths, introduces a new layer of complexity. Signal distortion from nonlinear gain threatens the very advantages these systems promise. Due to these problems, a detailed investigation into how PT-symmetric resonators behave under nonlinear stress is urgently needed.
A research team from Southeast University, China, has taken a critical step toward enabling chip-scale nonreciprocal devices by experimentally probing how PT-symmetric silicon micromechanical resonators exhibit nonlinear distortion. Published on May 21, 2025, in Microsystems & Nanoengineering, their study (DOI: 10.1038/s41378-025-00952-0) fills a knowledge gap in microelectromechanical systems (MEMS) design by quantifying when and how signal fidelity degrades under increasing input power. Their findings not only validate theoretical models but also reveal unexpected contributors to distortion—bringing us closer to practical, miniaturized components for wireless and sensing applications.
The researchers engineered a pair of silicon micromechanical resonators, one providing gain and the other loss, to operate in the "broken phase" of PT symmetry—a regime that enables nonreciprocal behavior. By applying external driving signals and adjusting vacuum and coupling conditions, they created a system where signals transmitted in one direction experience less attenuation than in the other. But the real test came when signal strength increased. The team discovered that at an input of 5 dBm, the gain began to compress—a key distortion threshold known as the 1 dB compression point. At 11.5 dBm, third-order intermodulation signals appeared, marking the IIP3. These distortions were influenced not just by nonlinear gain but also by inherent electrostatic forces and geometric softening in the silicon beams. This multi-source distortion challenges simple models and underscores the importance of comprehensive simulations. By aligning experiment with theory, the researchers provide the first quantitative framework for distortion in nonreciprocal micromechanical systems.
"Our study sheds light on what really happens inside PT-symmetric micromechanical systems when you push them hard," said Prof. Qing-An Huang, co-author of the study. "We now know that multiple nonlinear effects—not just gain—contribute to signal distortion. This insight allows us to fine-tune these devices for real-world applications and helps pave the way for reliable, miniaturized nonreciprocal components."
These findings have important implications for the design of next-generation MEMS-based isolators and circulators—key components in communication systems, radar, and signal processing. By identifying when and why distortion arises, engineers can now optimize PT-symmetric devices for higher signal fidelity and broader functionality. The results open a path toward compact, low-power nonreciprocal systems that can be seamlessly integrated into chips—transforming how we control signal flow at the microscale.
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References
DOI
Original Source URL
https://doi.org/10.1038/s41378-025-00952-0
Funding information
This work is supported by the National Natural Science Foundation of China (Grant nos. 61727812, 62074032).
About Microsystems & Nanoengineering
Microsystems & Nanoengineering is an online-only, open access international journal devoted to publishing original research results and reviews on all aspects of Micro and Nano Electro Mechanical Systems from fundamental to applied research. The journal is published by Springer Nature in partnership with the Aerospace Information Research Institute, Chinese Academy of Sciences, supported by the State Key Laboratory of Transducer Technology.
Journal
Microsystems & Nanoengineering
Subject of Research
Not applicable
Article Title
Nonlinear distortion of nonreciprocal transmission in parity-time-symmetric silicon micromechanical resonators
Article Publication Date
21-May-2025
COI Statement
The authors declare that they have no competing interests.