Fig. 6. Distance accuracy metrological calibration system. (IMAGE)

Beijing Institute of Technology Press Co., Ltd

Fig. 6. Distance accuracy metrological calibration system.

Caption

Fig. 6. Distance accuracy metrological calibration system. (B) Distance measurement results of the DSB-FSI system and the Renishaw laser interferometer. (C) Measurement deviations of the DSB-FSI system relative to the Renishaw laser interferometer.

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Space: Science & Technology

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