Fig. 1. Schematic diagram of the proposed novel lithographic illumination system relying on asymmetric diffusion metasurfaces and intelligent algorithms. (IMAGE)

Research

Fig. 1. Schematic diagram of the proposed novel lithographic illumination system relying on asymmetric diffusion metasurfaces and intelligent algorithms.

Caption

Fig. 1. Schematic diagram of the proposed novel lithographic illumination system relying on asymmetric diffusion metasurfaces and intelligent algorithms.

Credit

Copyright © 2026 Guangbiao Wang et al.

Usage Restrictions

Credit must be given to the creator.

License

CC BY

Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.