Synchrotron X-ray diffraction patterns of HZO thin films measured in real time using GIWAXS at the Pohang Accelerator Laboratory. (IMAGE)

Seoul National University College of Engineering

Synchrotron X-ray diffraction patterns of HZO thin films measured in real time using GIWAXS at the Pohang Accelerator Laboratory.

Caption

By tracking changes in diffraction signals during heat treatment, the researchers identified how different oxygen-vacancy concentrations affect the onset of crystallization and the selection of the final crystalline phase.

Credit

© Advanced Functional Materials, originally published in Advanced Functional Materials

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