Image 2 (IMAGE)

Tohoku University

Image 2

Caption

Optical micrographs of spiral springs at (a) relaxed length, (b) 7.3% elongation, and (c) 12.6% elongation. The dark regions are the through-etched air gaps. Stretching along the y-direction widens these gaps, changing the silicon-to-air ratio and structural anisotropy.

Credit

Optica

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None

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Original content

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