Figure 1 (IMAGE)

Tohoku University

Figure 1

Caption

Flexible and stretchable silicon fabricated using microelectromechanical systems (MEMS) micromachining. (a) Sample layout and spiral-spring pattern with a 200-µm pitch and nominal arm and gap widths of 10µm. (b) Flat and bent samples. Bending illustrates mechanical flexibility, and the terahertz measurements were performed under uniaxial stretching.

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Optica

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