Figure 2 | Exemplary demonstration of correction result. (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Figure 2 | Exemplary demonstration of correction result.

Caption

Figure 2 | Exemplary demonstration of correction result.  a A university logo as target design. b Measurement of the print corresponding to a. c Corrected design suggested by the neural network. d Measured print of the corrected design shown in c. e & g Profiles of the structures shown in a-d. f & h Profile differences of print and corrected print in comparison to the target design.

Credit

Sven Enns et al.

Usage Restrictions

Credit must be given to the creator.

License

CC BY

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