Fig. 2 Workflow of the nine‑channel convolution algorithm for curvilinear mask path integration. (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Fig. 2 Workflow of the nine‑channel convolution algorithm for curvilinear mask path integration.

Caption

Fig. 2 Workflow of the nine‑channel convolution algorithm for curvilinear mask path integration. Step 1: The DEDK undergoes a rotational similarity transformation and an adjoint rotation, and is decomposed into the basis set . Step 2: The full‑chip mask pattern is discretised. For each edge segment with a normal angle θi, the angular factors are computed and rasterised into nine image channels, formed by the tensor product {1, cos2θi, sin2θi}⊗{1, cosθi, sinθi}. Step 3: The kernel set is convolved with the corresponding angular factor images, and the results are summed to obtain the full‑chip Jones-matrix distribution components. Step 4: These components are linearly combined to synthesise the edge correction term.

Credit

Hao Jiang et al.

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