Partial SEM image of the switch matrix. (IMAGE)

SPIE--International Society for Optics and Photonics

Partial SEM image of the switch matrix.

Caption

Partial SEM image of the switch matrix: the whole structure patterned in the top silicon layer by dry etching seems to "float" as the oxide is removed. Each matrix unit contains an electrostatic comb drive that can selectively move portions of the waveguides to establish a desired light path from one of the 32 input ports to one of the 32 output ports.

Credit

Han et al.

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