Figure 3. Performance Comparison (IMAGE) Tokyo Institute of Technology Caption The graph shows a comparison of Brownian noise (BN) versus capacitance sensitivity. Thanks to the high density of gold, the BN achieved in this work was more than an order of magnitude lower than those of conventional devices when compared with the same sensitivity. Furthermore, our device was fabricated by surface micromachining that would useful for miniaturization. Credit Sensors and Materials Usage Restrictions None License Licensed content Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.