microelectromechanical systems (MEMS) (IMAGE) KTH, Royal Institute of Technology Caption A MEMS unit is seen beside a 2 cent Euro coin. Credit Simone Pagliano Usage Restrictions Credit must be given to the creator. License CC BY Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.