Interest in the development of MEMS
(microelectromechanical systems) has
grown steadily during the past decade.
These tiny devices, now used in such
applications as auto airbag systems, inkjet
printers, and display units, are attractive
because they take up little space and
require little or no assembly. They also are
cheap to produce in batch quantities
because they are made with a technology
that is already mature -- the microlithography
used to make silicon chips.