Figure 2 | Mass production and characteristics of the SiC waveguide and Fresnel lens. (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Figure 2 | Mass production and characteristics of the SiC waveguide and Fresnel lens.

Caption

Figure 2 | Mass production and characteristics of the SiC waveguide and Fresnel lens. a, Mass-produced 4-inch SiC waveguide wafer. b, Scanning electron microscope (SEM) image of the SiC nanograting. c, Atomic force microscope (AFM) image of the SiC nanograting. d, The SiC waveguide lens after packaging and laser cutting. e, Weight of the SiC waveguide lens. f, A laser-cut, eyeglass-shaped Fresnel lens. g-h, Confocal microscopy images of the Fresnel lens.

Credit

Boqu Chen, Ce Li et al.

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