Professor Shintake in his lab (IMAGE)

Okinawa Institute of Science and Technology (OIST) Graduate University

Professor Shintake in his lab

Caption

Professor Shintake examines a premade, commercial silicon wafer. He stands behind a prototype of his last design for in-line, EUV lithography. Efforts are underway to make a prototype for his current in-line design for high-NA EUV lithography.

Credit

Andrew Scott, OIST

Usage Restrictions

Credit must be given to the creator.

License

CC BY

Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.