Figure2 | Roadmap of curvilinear technology evolution. (IMAGE)

Light Publishing Center, Changchun Institute of Optics, Fine Mechanics And Physics, CAS

Figure2 | Roadmap of curvilinear technology evolution.

Caption

Figure2 | Roadmap of curvilinear technology evolution. This roadmap displays the development trajectory of curvilinear technology alongside advancing logic nodes. It covers key dimensions including design, OPC solutions, mask enablement, wafer metrology, and mask writers. The figure visually presents the future trend of these enabling technologies moving towards full-chip application and high integration.

Credit

Tie Jun Cui et al.

Usage Restrictions

Credit must be given to the creator.

License

CC BY

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