(a) Top view micrograph of the high energy-efficiency capacitive sensors integrated on a silicon substrate; (b) Photos of domestic CMOS wafers of the sensors; (c) Top view micrograph of capacitive humidity sensor; (d) Demonstration system of circuit board and humidity test. (IMAGE)
Caption
(a) Top view micrograph of the high energy-efficiency capacitive sensors integrated on a silicon substrate; (b) Photos of domestic CMOS wafers of the sensors; (c) Top view micrograph of capacitive humidity sensor; (d) Demonstration system of circuit board and humidity test.
Credit
School of Integrated Circuits, Peking University.
Usage Restrictions
None.
License
Original content