Mikhail Kats, Harvard University (IMAGE) Harvard University Caption Kats used an electron-beam evaporator in the cleanroom at the Center for Nanoscale Systems to perform thin-film deposition. 'This is one of the most practical, easy-to-use tools,' he says. Credit Eliza Grinnell, Harvard SEAS Usage Restrictions Editorial use only License Licensed content Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of news releases posted to EurekAlert! by contributing institutions or for the use of any information through the EurekAlert system.